Overview of Parallel Plate Electrostatic Actuators
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Main Features
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Developments
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Rotational Electrostatic Actuator
HAXEL with both in-plane and out-of-plane motion. Shear and normal force from a single actuator
Stabilization of a Parallel-Plate Microactuator via Control Lyapunov Functions
Electrostatics - Parallel Plates
Electrostatic Comb-drive Micro-actuator based on C-DP-DP Flexure
Why Electrostatic Actuators Are Essential for MEMS
Why MEMS Actuators Use Parallel Plate Models
Electric Field of Parallel Plates
HAXELs: Hydraulically Amplified Electrostatic Actuators for Wearable Haptics
Large range dual-axis micro-stage driven by electrostatic comb-drive actuators
Curved electrode actuators and comb drives
Full Guide
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Last Updated: August 15, 2026
Future Outlook
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